Microstructure dependent ammonia sensing properties of nanostuctured zinc oxide thin films using in-house designed gas exposure facility

Author

Prasad, A.K. ; Dhonge, Baban P. ; Mathews, Tom ; Dash, S. ; Tyagi, A.K. ; Shwathy, R. ; Murali, N.

Author_Institution

Surface & Nanosci. Div., IGCAR, Kalpakkam, India

fYear

2011

fDate

28-30 Nov. 2011

Firstpage

73

Lastpage

77

Abstract

ZnO nanostructured thin films were grown by spray pyrolysis on alumina substrate pre-patterned with gold interdigitated electrodes at three different substrate temperatures (viz 350°C, 400°C and 450°C). Crystal structure and morphology were determined by GIXRD and FESEM respectively. Ammonia sensing experiments were then performed in the in-house designed Exposure Facility for Gas Sensing (EFGS) at different operating temperatures. The effect of minute changes in morphology on gas sensing was studied and optimum synthesis and operating temperatures was arrived at and related towards efforts to synthesize an efficient ZnO based thin film sensor.

Keywords

II-VI semiconductors; ammonia; crystal microstructure; crystal morphology; crystal structure; gas sensors; nanofabrication; pyrolysis; semiconductor thin films; spraying; thin film sensors; wide band gap semiconductors; zinc compounds; FESEM; GIXRD; NH₃; ZnO; alumina substrate; ammonia sensing; ammonia sensing properties; crystal morphology; crystal structure; gas sensing; gold interdigitated electrodes; in-house designed gas exposure facility; microstructure; nanostuctured zinc oxide thin films; spray pyrolysis; temperature 350 degC to 450 degC; zinc oxide-based thin film sensor; Gold; Heating; Microstructure; Morphology; Sensors; Software; Substrates; Ammonia Sensing; Microstructure; Spray Pyrolysis; ZnO thin film;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanoscience, Engineering and Technology (ICONSET), 2011 International Conference on

Conference_Location

Chennai

Print_ISBN

978-1-4673-0071-1

Type

conf

DOI

10.1109/ICONSET.2011.6167906

Filename

6167906