DocumentCode
3533751
Title
A stiffness-defined silicon plane bending method to realize perfectly-curved surface formation for tunable parabolic mirrors
Author
Binh, Tran Nam ; Morishita, Satoshi ; Kubota, Masanori ; Mita, Yoshio
Author_Institution
Dept. of Electr. & Electron. Eng., Univ. of Tokyo, Tokyo, Japan
fYear
2012
fDate
6-9 Aug. 2012
Firstpage
61
Lastpage
62
Abstract
The authors propose a universal method to form cylindrically-curved surfaces by dynamically bending in-plane a DRIE-etched flat vertical silicon plate with microactuator. The stiffness is designed position-dependent, thus allowing ideal curvature over large area.
Keywords
bending; micro-optomechanical devices; microactuators; mirrors; optical tuning; silicon; sputter etching; DRIE; deep reactive ion etching; microactuator; perfectly curved surface formation; stiffness defined silicon plane bending method; tunable parabolic mirrors; vertical silicon plate; Approximation methods; Microactuators; Mirrors; Optical surface waves; Shape; Silicon; Surface waves; Curved Surface; Deep RIE; Parabola Mirror; in-Plane Optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location
Banff, AB
ISSN
2160-5033
Print_ISBN
978-1-4577-1511-2
Type
conf
DOI
10.1109/OMEMS.2012.6318802
Filename
6318802
Link To Document