• DocumentCode
    3533799
  • Title

    Multimode interference (MMI) waveguides-based photonic modulators integrated on SOI substrates

  • Author

    Chuang, Ricky W. ; Hsu, Mao-Teng

  • fYear
    2012
  • fDate
    6-9 Aug. 2012
  • Firstpage
    69
  • Lastpage
    70
  • Abstract
    Multimode interference (MMI) waveguides-based photonic modulators integrated on silicon-on-insulator (SOI) substrates are designed, fabricated and evaluated. With 100% modulation depth achieved, the lowest rise and fall times were respectively measured to be 52 and 48 ns. The highest 3 dB bandwidth in the excess of 6.5 MHz was determined from the corresponding devices.
  • Keywords
    elemental semiconductors; optical modulation; optical waveguides; silicon; silicon-on-insulator; SOI; Si; frequency 6.5 MHz; multimode interference waveguides-based photonic modulators; silicon-on-insulator substrates; time 48 ns; time 52 ns; Frequency measurement; Frequency modulation; Optical device fabrication; Optical interferometry; Optical modulation; Optical waveguides;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
  • Conference_Location
    Banff, AB
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4577-1511-2
  • Type

    conf

  • DOI
    10.1109/OMEMS.2012.6318806
  • Filename
    6318806
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3533799