DocumentCode
3533923
Title
Assembly of a MEMS-based Wolter type-I x-ray optic
Author
Kakiuchi, T. ; Ezoe, Y. ; Moriyama, T. ; Mitsuishi, I. ; Ogawa, T. ; Mitsuda, K. ; Morishita, K. ; Nakajima, K.
Author_Institution
Dept. of Phys., Tokyo Metropolitan Univ., Hachioji, Japan
fYear
2012
fDate
6-9 Aug. 2012
Firstpage
85
Lastpage
86
Abstract
Implementation of a MEMS-based Wolter type-I optic that is suitable for future planetary exploration missions is described. A devised alignment system permits independent adjustment of position and angular settings of x-ray mirrors.
Keywords
X-ray astronomy; X-ray optics; micromechanical devices; mirrors; MEMS based Wolter type-I x-ray optic; alignment system; angular settings; planetary exploration missions; position settings; x-ray mirrors; Accuracy; Adaptive optics; Optical beams; Optical device fabrication; Optical diffraction; Optical imaging; X-ray imaging; Dry etching; Space missions; X-ray mirrors;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location
Banff, AB
ISSN
2160-5033
Print_ISBN
978-1-4577-1511-2
Type
conf
DOI
10.1109/OMEMS.2012.6318814
Filename
6318814
Link To Document