DocumentCode :
3533937
Title :
MEMS-based novel X-ray optics for future astronomical missions
Author :
Mitsuishi, I. ; Ezoe, Y. ; Moriyama, T. ; Ogawa, T. ; Kakiuchi, T. ; Ohashi, T. ; Mita, M. ; Maeda, Y. ; Mitsuda, K. ; Horade, M. ; Sugiyama, S. ; Riveros, R. ; Yamaguchi, H. ; Kanamori, Y. ; Morishita, K. ; Nakajima, K. ; Maeda, R.
Author_Institution :
Tokyo Metropolitan Univ., Tokyo, Japan
fYear :
2012
fDate :
6-9 Aug. 2012
Firstpage :
87
Lastpage :
88
Abstract :
We have been developing our original MEMS-based X-ray optics for future astronomical missions. To date, we verified the focusing of optical light and X-ray for the first time. The concept and recent advances are reviewed.
Keywords :
LIGA; X-ray optics; micromechanical devices; optical focusing; sputter etching; MEMS; X-ray optics; future astronomical missions; optical light focusing; Educational institutions; Focusing; Micromechanical devices; Mirrors; Telescopes; X-ray imaging; DRIE; X-ray optics; annealing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
ISSN :
2160-5033
Print_ISBN :
978-1-4577-1511-2
Type :
conf
DOI :
10.1109/OMEMS.2012.6318815
Filename :
6318815
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3533937
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