Title :
Demonstration of a method for detecting MEMS suspended beam height
Author :
Putrino, Gino ; Martyniuk, Mariusz ; Keating, Adrian ; Faraone, Lorenzo ; Dell, John
Author_Institution :
Sch. of Electr., Electron. & Comput. Eng., Univ. of Western Australia, Crawley, WA, Australia
Abstract :
An integrated optical technique for interrogating the height of a suspended micro-electro-mechanical systems (MEMS) beam is demonstrated. This technique is highly sensitive, and capable of using WDM techniques to interrogate the height information of large arrays of beams. Our experimental results show a 7 dB change in the transmitted optical power when the beam height changes by 100 nm. It is predicted that this device will be able to measure the height to a shot-noise limited deflection noise density (DND) of 4 fm/√Hz.
Keywords :
height measurement; integrated optics; micromechanical devices; MEMS suspended beam height detection; WDM techniques; height information; integrated optical technique; large beam arrays; microelectromechanical systems beam; shot-noise limited deflection noise density; transmitted optical power; Australia; Biomedical optical imaging; Gratings; Laser beams; Optical device fabrication; Optical sensors; Optical waveguides;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318817
