Demonstration of a method for detecting MEMS suspended beam height

Author

Putrino, Gino ; Martyniuk, Mariusz ; Keating, Adrian ; Faraone, Lorenzo ; Dell, John

Author_Institution

Sch. of Electr., Electron. & Comput. Eng., Univ. of Western Australia, Crawley, WA, Australia

fYear

2012

fDate

6-9 Aug. 2012

Firstpage

91

Lastpage

92

Abstract

An integrated optical technique for interrogating the height of a suspended micro-electro-mechanical systems (MEMS) beam is demonstrated. This technique is highly sensitive, and capable of using WDM techniques to interrogate the height information of large arrays of beams. Our experimental results show a 7 dB change in the transmitted optical power when the beam height changes by 100 nm. It is predicted that this device will be able to measure the height to a shot-noise limited deflection noise density (DND) of 4 fm/√Hz.

Keywords

height measurement; integrated optics; micromechanical devices; MEMS suspended beam height detection; WDM techniques; height information; integrated optical technique; large beam arrays; microelectromechanical systems beam; shot-noise limited deflection noise density; transmitted optical power; Australia; Biomedical optical imaging; Gratings; Laser beams; Optical device fabrication; Optical sensors; Optical waveguides;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2012 International Conference on

Conference_Location

Banff, AB

ISSN

2160-5033

Print_ISBN

978-1-4577-1511-2

Type

conf

DOI

10.1109/OMEMS.2012.6318817

Filename

6318817