Title :
Microstructures and magnetic properties of the FIB irradiated Co/Pd multilayer films
Author :
Suharyadi, Edi ; Natsume, Shinji ; Kato, Takcshi ; Tsunashima, Shigcru ; Iwata, Satoshi
Author_Institution :
Dept. of Electron., Nagoya Inst. of Technol., Japan
Abstract :
Multilayer films composed of Pd/(Co/Pd)N/SiN are prepared on a Si substrate by RF magnetron sputtering, where N was varied 6 and 20. The Co/Pd multilayer films are irradiated by focused ion beams with various ion doses. The etching depth of irradiated area was estimated from atomic force microscopy (AFM). The magnetic properties are measured by alternating gradient magnetometer (AGM) and torque magnetometer. The layered and crystalline structures were analyzed by X-ray diffraction (XRD) technique.
Keywords :
X-ray diffraction; atomic force microscopy; cobalt; crystal microstructure; crystal structure; interface structure; ion beam effects; magnetic anisotropy; magnetic multilayers; palladium; periodic structures; silicon compounds; sputtered coatings; Pd-(CoPd)N-SiN; RF magnetron sputtering; Si; X-ray diffraction; alternating gradient magnetometer; atomic force microscopy; crystalline structure; etching depth; focused ion beam irradiation; ion dose; layered structure; microstructure; multilayer film; torque magnetometer; Atomic force microscopy; Magnetic films; Magnetic multilayers; Magnetic properties; Magnetometers; Microstructure; Radio frequency; Semiconductor films; Silicon compounds; Sputtering;
Conference_Titel :
Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
Print_ISBN :
0-7803-9009-1
DOI :
10.1109/INTMAG.2005.1463883