• DocumentCode
    3534263
  • Title

    Monolithic integrated MEMS mirror array module towards low electrical interference

  • Author

    Sakata, Tomomi ; Usui, Mituo ; Kodate, Junichi ; Jin, Yoshito

  • Author_Institution
    NTT Microsyst. Integration Labs., NTT Corp., Atsugi, Japan
  • fYear
    2012
  • fDate
    6-9 Aug. 2012
  • Firstpage
    136
  • Lastpage
    137
  • Abstract
    A MEMS mirror array module monolithically integrates a MEMS mirror chip with shield walls bonded to a control electrode chip. The fabricated mirror array module successfully operates with low electrical interference.
  • Keywords
    integrated optics; interference; micro-optomechanical devices; microfabrication; micromirrors; modules; optical arrays; optical fabrication; control electrode chip; electrical interference; integrated MEMS mirror array module; monolithic integration; Arrays; Electrodes; Interference; Micromechanical devices; Mirrors; Optical switches; Silicon; electrical interference; monolithic integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
  • Conference_Location
    Banff, AB
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4577-1511-2
  • Type

    conf

  • DOI
    10.1109/OMEMS.2012.6318840
  • Filename
    6318840
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3534263