Title :
Microfluxgates performances improvement in microtechnology
Author :
Joisten, H. ; Guilhamat, B. ; Audoin, M. ; Leger, J.M. ; Cuchet, R. ; Barrois, G. ; Albertini, J.B. ; Gaud, P. ; Bloch, D.
Author_Institution :
CEA, Centre d´´Etudes de Grenoble, France
Abstract :
Two different technological types of microfluxgate sensors that able to cancel magnetic instabilities and measure magnetic field at the nanoTesla level are presented. The first type has a flat conductive layer deposited inside, above or under the technological solenoidal stack while the second one has a conductive solenoidal coil (with a magnetic core) deposited at the same levels as the microfluxgate technological stack. The effect of stabilization of the output signal of these microfluxgates is investigated.
Keywords :
magnetic cores; magnetic noise; magnetic sensors; microsensors; solenoids; conductive solenoidal coil; flat conductive layer; magnetic instabilities; microfluxgate technological stack; microfluxgates sensors; microtechnology; nanoTesla level; output signal; stabilization; technological solenoidal stack; Coils; Frequency; Magnetic cores; Magnetic field measurement; Magnetic fields; Magnetic noise; Magnetic sensors; Micromagnetics; Perpendicular magnetic recording; Sensor phenomena and characterization;
Conference_Titel :
Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
Print_ISBN :
0-7803-9009-1
DOI :
10.1109/INTMAG.2005.1463914
