Microfluxgates performances improvement in microtechnology

Author

Joisten, H. ; Guilhamat, B. ; Audoin, M. ; Leger, J.M. ; Cuchet, R. ; Barrois, G. ; Albertini, J.B. ; Gaud, P. ; Bloch, D.

Author_Institution

CEA, Centre d´´Etudes de Grenoble, France

fYear

2005

fDate

4-8 April 2005

Firstpage

971

Lastpage

972

Abstract

Two different technological types of microfluxgate sensors that able to cancel magnetic instabilities and measure magnetic field at the nanoTesla level are presented. The first type has a flat conductive layer deposited inside, above or under the technological solenoidal stack while the second one has a conductive solenoidal coil (with a magnetic core) deposited at the same levels as the microfluxgate technological stack. The effect of stabilization of the output signal of these microfluxgates is investigated.

Keywords

magnetic cores; magnetic noise; magnetic sensors; microsensors; solenoids; conductive solenoidal coil; flat conductive layer; magnetic instabilities; microfluxgate technological stack; microfluxgates sensors; microtechnology; nanoTesla level; output signal; stabilization; technological solenoidal stack; Coils; Frequency; Magnetic cores; Magnetic field measurement; Magnetic fields; Magnetic noise; Magnetic sensors; Micromagnetics; Perpendicular magnetic recording; Sensor phenomena and characterization;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International

Print_ISBN

0-7803-9009-1

Type

conf

DOI

10.1109/INTMAG.2005.1463914

Filename

1463914