DocumentCode
3535792
Title
Micromotors
Author
Tai, Yu-Chong
Author_Institution
Caltech Micromachining Group, California Inst. of Technol., Pasadena, CA, USA
fYear
1995
fDate
6-10 Nov 1995
Firstpage
8
Lastpage
11
Abstract
The general development of electrostatic and magnetostatic micromotors is discussed. Electrostatic micromotors already have many useful applications and will continue to flourish. On the other hand, magnetostatic micromotors are emerging as fabrication technologies are developing. The advantages of larger forces and longer working distances are especially promising
Keywords
electrostatic devices; magnetostatics; micromotors; electrostatic micromotors; fabrication technologies; magnetostatic micromotors; micromotor forces; working distances; Displays; Electrodes; Electrostatic actuators; FETs; Magnetostatics; Microactuators; Micromechanical devices; Micromotors; Microstructure; Mirrors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on
Print_ISBN
0-7803-2624-5
Type
conf
DOI
10.1109/TENCON.1995.496322
Filename
496322
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