Title :
The slowing systems fabrication based on alumina and polymeric media
Author :
Podvigalkin, V.Y.
Author_Institution :
Saratov Branch, Kotel´nirov Inst. of Radioeng. & Electron., Saratov, Russia
Abstract :
The construction of the slowing structures with using the polymeric current - carrying structures in integrated circuits is described. The configuration of the section relief of integrated circuits is based on the method of vertically through micro profiles. The vertically through micro profiles makes the vertically through micro cavities. Such architecture of integrated of electromagnetic fields in micro cavities without touching the dielectric carrier.
Keywords :
alumina; electromagnetic fields; microcavities; microwave integrated circuits; polymers; slow wave structures; alumina; electromagnetic fields; integrated circuits; polymeric current-carrying structures; polymeric media; slow wave structure; slowing system fabrication; vertically through microcavity; vertically through microprofiles;
Conference_Titel :
Actual Problems of Electron Devices Engineering (APEDE), 2012 International Conference on
Conference_Location :
Saratov
Print_ISBN :
978-1-4673-2096-2
DOI :
10.1109/APEDE.2012.6478051
