• DocumentCode
    354133
  • Title

    X-band GaAs MMIC size reduction and integration

  • Author

    Griffin, E.L.

  • Author_Institution
    M/A-COM Inc., Roanoke, VA, USA
  • Volume
    2
  • fYear
    2000
  • fDate
    11-16 June 2000
  • Firstpage
    709
  • Abstract
    This paper describes efforts at ITT to develop cost effective GaAs X-Band MMICs. The ITT MSAG(R) GaAs MMIC process is first described. A brief discussion on the merits of chip integration is followed by a discussion of the ITT338510D commercial 12-Watt MMIC, and the ITT373504D commercial control chip (phase shifter, attenuator, driver, digital control) with emphasis on our efforts to reduce chip area.
  • Keywords
    III-V semiconductors; field effect MMIC; gallium arsenide; integrated circuit economics; integrated circuit yield; 12 W; GaAs; ITT MSAG process; ITT338510D; ITT373504D; MMIC; X-band; attenuator; chip area; chip integration; digital control; driver; multifunction self-aligned gate; phase shifter; size reduction; Assembly; Attenuators; Costs; FETs; Gallium arsenide; Ion implantation; MMICs; Manufacturing processes; Phase shifters; Robustness;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Symposium Digest. 2000 IEEE MTT-S International
  • Conference_Location
    Boston, MA, USA
  • ISSN
    0149-645X
  • Print_ISBN
    0-7803-5687-X
  • Type

    conf

  • DOI
    10.1109/MWSYM.2000.863281
  • Filename
    863281