Title :
Modeling of MEMS capacitive switches by TLM
Author :
Vietzorreck, L. ; Coccetti, F. ; Chtchekatourov, V. ; Russer, P.
Author_Institution :
Inst. fur Hochfrequenztech., Tech. Univ. Munchen, Germany
Abstract :
The high-frequency behaviour of a microelectromechanical capacitive switch is investigated using TLM. A post-processing of the time-domain signal is presented which avoids long calculation times. The calculated results of a metal membrane switch show very good agreement to results obtained by other numerical methods and measurements.
Keywords :
micromechanical devices; semiconductor device models; semiconductor switches; transmission line matrix methods; MEMS capacitive switches; TLM; calculation times; high-frequency behaviour; metal membrane switch; time-domain signal; Biomembranes; Conductors; Coplanar waveguides; Dielectric thin films; Electrodes; Frequency domain analysis; Micromechanical devices; Phased arrays; Switches; Switching circuits;
Conference_Titel :
Microwave Symposium Digest. 2000 IEEE MTT-S International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-5687-X
DOI :
10.1109/MWSYM.2000.863579
