Title :
A multi-physics simulation technique for integrated MEMS
Author :
Toshiyoshi, Hiroshi ; Konishi, Tsuyoshi ; Machida, Kenji ; Masu, Kazuya
Author_Institution :
Res. Center for Adv. Sci. & Technol., Univ. of Tokyo, Tokyo, Japan
Abstract :
We have developed a multi-physics simulation platform for microelectromechanical systems (MEMS) on a spice-based circuit simulator (LTspice) and by interpreting the analytical models for electromechanical components such as electrostatic parallel-plate actuator, viscoelastic spring, and mechanical anchor by using behavioral current/voltage sources. The Kernel solver for the mechanical equation of motion (EOM) has been programmed by simply using the integral function of the LTspice mathematic library. Simulation capability has been extended to and tested against the electrostatic digital torsion mirror device integrated with CMOS level shifter circuit.
Keywords :
CMOS integrated circuits; SPICE; micromechanical devices; CMOS level shifter circuit; EOM; LTspice mathematic library; SPICE-based circuit simulator; behavioral current-voltage sources; electrostatic digital torsion mirror device; electrostatic parallel-plate actuator; integral function; integrated MEMS; kernel solver; mechanical anchor; mechanical equation of motion; microelectromechanical systems; multiphysics simulation technique; viscoelastic spring; Electrostatics; Force; Integrated circuit modeling; MOS devices; Mathematical model; Micromechanical devices; Mirrors;
Conference_Titel :
Electron Devices Meeting (IEDM), 2012 IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4673-4872-0
Electronic_ISBN :
0163-1918
DOI :
10.1109/IEDM.2012.6478989
