Measurements on mechanical properties of boron-doped silicon materials for micro inertia sensor

The capacitive structure of comb capacitive micromachined gyroscope is a kind of important structure. The mechanical properties of micro inertia sensor material had changed when the structures experienced high temperature boron diffusion, lithography and etching et.al. micromachined process. Therefore, it is necessary to measure the basic mechanical properties of boron-doped material in order to supply exact material parameters for design and fabrication of micro inertia sensor. With the rapid development of measurement technologies, the nano indentation technology had become an ideal method to obtain the mechanical properties of MEMS structures material accurately. We obtained the elastic modulus and hardness of heavy boron-doped silicon material using nano indenter. The experimental results showed that the elastic modulus and hardness of heavy boron-doped silicon material had increased comparing with the silicon material.