Rotatory stepping piezoelectric motor with micro-angle

The rotatory piezoelectric motor(PZT) with micro-angle, based on inchworm motion, is presented. By the flexible machinery, the displacement of the piezoelectric actuators is transformed into angle. The clampers and actuators which are made of piezoelectric ceramic are both disposed in symmetrical relationship. By clamping or releasing of clampers and extending or retracting of actuators, it could achieve a kind of push-pull relay movement. In this way, the movement of platform is smooth and continuous. With the proper four-channels driving signals, the motor is moved linearly with single step or multi-step. The performances of the motor are tested through experiments. The results show that the motion of the motor is linear, The moving speed can reach 430.4"/s at the voltage of 160 V and the minimal step is less than 3".