A novel tunable low-pass filter based on MEMS and CPW

Author

Wang, Chao ; Guo, Xing-Long ; Ou-yang, Wei-Xia ; Zhang, Yong-hua ; Lai, Zong-sheng

Author_Institution

Inst. of Microelectron. Circuit & Syst., East China Normal Univ., Shanghai, China

fYear

2009

fDate

16-19 Aug. 2009

Abstract

This paper presents a new type of tunable low-pass filter for millimeter-waves. The filter is based on the slow-wave coplanar waveguide (CPW) lines and tuned by the MEMS capacitive shunt switches. There are 5 switches which can provide two orders of tunable mode. In the first order tuning, the 3 dB cut-off frequency changes from 8.2 GHz to 10.5 GHz, and the second order tuning is 8.2 GHz to 16.8 GHz. The tested results show that the pass-band ripple is less than 2 dB and the maximal out-of-band rejection is better than 20 dB. The driven voltages of the switches are around 40 V.

Keywords

coplanar waveguides; millimetre wave filters; waveguide filters; CPW; MEMS capacitive shunt switches; frequency 8.2 GHz to 16.8 GHz; millimeter wave filter; slow-wave coplanar waveguide lines; tunable low-pass filter; Bridge circuits; Coplanar waveguides; Cutoff frequency; Inductance; Instruments; Low pass filters; Micromechanical devices; Switches; Tunable circuits and devices; Tuning; CPW; RF MEMS switches; Tunable low-pass filter;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Measurement & Instruments, 2009. ICEMI '09. 9th International Conference on

Conference_Location

Beijing

Print_ISBN

978-1-4244-3863-1

Electronic_ISBN

978-1-4244-3864-8

Type

conf

DOI

10.1109/ICEMI.2009.5274678

Filename

5274678