Two and three dimensional arrays of closed packed microplasma jet devices: Demonstration of large scale arrays having packing density as large as 900/cm2

Summary form only given. Large scale, close-packed microplasma jet arrays is fabricated and demonstrated in a moldable, resilient and optically transparent polymer. Highest packing density to date of 900/cm² has been achieved. Each microchannels having the diameter less than 200 μm was driven by a 20 kHz ac waveforms with a lowest breakdown potential of ~ 1 kV_RMS, and parallel operation of all the jet devices was observed with high uniformity less than 10%. No evidence of perturbation or interaction was observed even in the closest channel-to-channel (that is jet-to-jet) distance of 100 μm.