DocumentCode
3546604
Title
A new electronic scheme to compensate MEMS resonators nonlinearities
Author
Levy, R. ; Papin, G.
Author_Institution
ONERA (French Aerosp. Lab.), Chatillon, France
fYear
2012
fDate
Jan. 29 2012-Feb. 2 2012
Firstpage
508
Lastpage
510
Abstract
MEMS resonators are used for miniature time references and vibrating sensors. The mechanical nonlinearities of such micro resonators limit their power handling and thus the frequency stability and phase noise of MEMS resonators based oscillators. This paper reports a new circuit scheme to compensate the nonlinear behavior of MEMS resonators. Simulations and experimental results show the effective nonlinearity compensation.
Keywords
micromechanical resonators; microsensors; oscillators; MEMS resonator based oscillators; MEMS resonator nonlinearities; electronic scheme; frequency stability; mechanical nonlinearities; microresonators; phase noise; vibrating sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location
Paris
ISSN
1084-6999
Print_ISBN
978-1-4673-0324-8
Type
conf
DOI
10.1109/MEMSYS.2012.6170174
Filename
6170174
Link To Document