DocumentCode :
3546631
Title :
Inkjet printed all-polymer flexural plate wave sensors
Author :
Busch, J.R. ; Sielmann, C. ; Man, G. ; Tsan, D. ; Walus, K. ; Stoeber, B.
Author_Institution :
Univ. of British Columbia, Vancouver, BC, Canada
fYear :
2012
fDate :
Jan. 29 2012-Feb. 2 2012
Firstpage :
571
Lastpage :
574
Abstract :
We demonstrate an all-polymer flexural-plate-wave gravimetric sensor using piezoelectric PVDF and conductive PEDOT:PSS. An inkjet-printed interdigital transducer (IDT) is used to excite Lamb waves within the film that are measured both electronically, using a second IDT, and mapped directly using a scanning laser Doppler vibrometer. Pulsed wave excitation isolates the weak acoustic signal from the electromagnetic crosstalk, enabling the measurement of relative changes in the resonant frequency, Δf/f0, with the addition of mass, Δm, to the sensing area. A gravimetric mass sensitivity equivalent to Δf/(f0Δm) = -153 cm2/g has been measured for mass loading with a polymer layer.
Keywords :
ink jet printing; polymers; sensors; transducers; Lamb waves; electromagnetic crosstalk; gravimetric mass sensitivity; inkjet printed all-polymer flexural plate gravimetric sensor; inkjet-printed interdigital transducer; mass loading; piezoelectric PVDF; polymer layer; pulsed wave excitation; resonant frequency; scanning laser Doppler vibrometer; weak acoustic signal; Acoustic measurements; Acoustics; Films; Frequency measurement; Sensitivity; Sensors; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
ISSN :
1084-6999
Print_ISBN :
978-1-4673-0324-8
Type :
conf
DOI :
10.1109/MEMSYS.2012.6170181
Filename :
6170181
Link To Document :
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