DocumentCode
3546769
Title
Inorganic/Parylene composite thin film toward 3D robust structures
Author
Hori, M. ; Kiriya, D. ; Takeuchi, S.
Author_Institution
Univ. of Tokyo, Tokyo, Japan
fYear
2012
fDate
Jan. 29 2012-Feb. 2 2012
Firstpage
448
Lastpage
451
Abstract
We report a composite thin film consisting of inorganic calcium carbonate (CaCO3) crystals and organic Parylene. The CaCO3 crystals were grown on a surface of poly(vinyl alcohol) (PVA) on Parylene and covered the whole region of organic surface homogeneously. The thickness of CaCO3 crystals was about 180 nm and that of organic layers of Parylene with PVA was about 2 μm. Importantly, the thin film shows synergistic properties of CaCO3 crystals and Parylene; the film shows transparency, handleability, shape adjustability and resistivity for fire. Our results indicate that our approach should be useful for harnessing both inorganic and organic properties synergistically.
Keywords
calcium compounds; composite materials; crystal growth; semiconductor thin films; 3D robust structures; CaCO3; inorganic calcium carbonate; inorganic properties; inorganic/parylene composite thin film; poly(vinyl alcohol); Conductivity; Crystals; Fabrication; Films; Fires; Organic materials; Shape;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location
Paris
ISSN
1084-6999
Print_ISBN
978-1-4673-0324-8
Type
conf
DOI
10.1109/MEMSYS.2012.6170222
Filename
6170222
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