• DocumentCode
    3546769
  • Title

    Inorganic/Parylene composite thin film toward 3D robust structures

  • Author

    Hori, M. ; Kiriya, D. ; Takeuchi, S.

  • Author_Institution
    Univ. of Tokyo, Tokyo, Japan
  • fYear
    2012
  • fDate
    Jan. 29 2012-Feb. 2 2012
  • Firstpage
    448
  • Lastpage
    451
  • Abstract
    We report a composite thin film consisting of inorganic calcium carbonate (CaCO3) crystals and organic Parylene. The CaCO3 crystals were grown on a surface of poly(vinyl alcohol) (PVA) on Parylene and covered the whole region of organic surface homogeneously. The thickness of CaCO3 crystals was about 180 nm and that of organic layers of Parylene with PVA was about 2 μm. Importantly, the thin film shows synergistic properties of CaCO3 crystals and Parylene; the film shows transparency, handleability, shape adjustability and resistivity for fire. Our results indicate that our approach should be useful for harnessing both inorganic and organic properties synergistically.
  • Keywords
    calcium compounds; composite materials; crystal growth; semiconductor thin films; 3D robust structures; CaCO3; inorganic calcium carbonate; inorganic properties; inorganic/parylene composite thin film; poly(vinyl alcohol); Conductivity; Crystals; Fabrication; Films; Fires; Organic materials; Shape;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
  • Conference_Location
    Paris
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-0324-8
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2012.6170222
  • Filename
    6170222