An automatically mode-matched MEMS gyroscope with 50 Hz bandwidth

This paper presents the architecture and experimental verification of an automatic mode matching system that uses the phase relationship between the residual quadrature and drive signals in a gyroscope to accomplish and maintain the frequency matching condition. The system also allows controlling the system bandwidth by adjusting the closed loop controller parameters of the sense mode. This study experimentally examines the angle random walk (ARW) and bias instability performances of the fully decoupled MEMS gyroscopes under mismatched (~100Hz) and mode-matched conditions. Moreover, it has been experimentally shown that the performance of the studied MEMS gyroscopes is improved up to 2.4 times in bias instability and 1.7 times in ARW with 50 Hz system bandwidth under the mode-matched condition reaching down to a bias instability of 0.83°/hr and an ARW of 0.026°/√hr.