Shear force sensor using a cantilever with liquid-embedded hinges

We propose a shear force sensor using standing piezoresistive cantilevers with liquid-embedded hinges. The hinges of the cantilevers are positioned in elastomer compartments filled with liquid, while the tip and the root of them are buried in the elastomer shell of the compartments. This design allows most of the cantilever body to freely deform when the compartment shell is deformed with shear forces. Consequently, the stress concentration that is often found in conventional design of such type of sensor is effectively eliminated. The sensor therefore endures larger loading. We measured the relationship between the displacement of the tip of the cantilevers and their change in resistivity, and calculated the sensitivity of the sensors. We confirmed that the proposed design improved the measurement force range of such piezoresistive-cantilever-based force sensors.