Title :
Acoustic whispering gallery mode resonator with Q > 109,000 at 515MHz
Author :
Rocheleau, Tristan O. ; Naing, Thura Lin ; Ren, Zeying ; Nguyen, Clark T -C
Author_Institution :
Univ. of California, Berkeley, CA, USA
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
A capacitive-gap transduced micromechanical resonator design based on an acoustic whispering gallery mode (WGM) constructed in micro-crystalline diamond has achieved a Q >;109,000 at 515MHz, posting an f·Q product of >;5.6×1013. The key to this performance is anchor-loss nulling by the WGM, as evidenced by comparison of Q values between radial-contour modes and WGM ones on the same disk device, where a 2-3× enhancement of Q is observed. Q´s exceeding 100,000 should enable unprecedented RF front-end frequency selectivity and low phase noise oscillators for future communications.
Keywords :
Q-factor; micromechanical resonators; oscillators; whispering gallery modes; RF front-end frequency selectivity; WGM; acoustic whispering gallery mode resonator; anchor-loss nulling; capacitive-gap; frequency 515 MHz; microcrystalline diamond; phase noise oscillator; radial-contour mode; transduced micromechanical resonator; Acoustics; Diamond-like carbon; Electrodes; Frequency measurement; Resonant frequency; Whispering gallery modes;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170276
