DocumentCode :
3547162
Title :
A compact circumferential scanned endoscopic imaging probe using a MEMS-driven pyramidal polygon reflector
Author :
Mu, X.J. ; Zhou, G. ; Yu, H.B. ; Du, Y. ; Feng, H.H. ; Tsai, J.M.L. ; Chau, F.S.
Author_Institution :
Micro & Nano Syst. Initiative, Nat. Univ. of Singapore, Singapore, Singapore
fYear :
2012
fDate :
Jan. 29 2012-Feb. 2 2012
Firstpage :
902
Lastpage :
905
Abstract :
A novel prototype of electrothermal chevron-beam actuator based microelectromechanical systems (MEMS) platform has been successfully developed for circumferential scan. Microassembly technology is utilized to construct this platform, which consists of a MEMS chevron-beam type microactuator and a micro pyramidal polygon reflector. The proposed electrothermal microactuators with a two-stage electrothermal cascaded chevron-beam driving mechanism provide displacement amplification, and thus driving a highly reflective micro-pyramidal polygon reflector to rotate a large angle for light beam scan. This MEMS platform is ultra-compact, supports circumferential imaging capability, and is suitable for endoscopic optical coherence tomography (EOCT) application, for example intravascular cancer detection.
Keywords :
bioMEMS; biomedical optical imaging; cancer; endoscopes; microactuators; optical tomography; MEMS chevron-beam type microactuator; MEMS-driven pyramidal polygon reflector; Microassembly technology; compact circumferential scanned endoscopic imaging probe; displacement amplification; electrothermal chevron-beam actuator based microelectromechanical systems; electrothermal microactuators; endoscopic optical coherence tomography application; intravascular cancer detection; micropyramidal polygon reflector; two-stage electrothermal cascaded chevron-beam driving mechanism; Microactuators; Micromechanical devices; Optical reflection; Probes; Scanning electron microscopy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
ISSN :
1084-6999
Print_ISBN :
978-1-4673-0324-8
Type :
conf
DOI :
10.1109/MEMSYS.2012.6170331
Filename :
6170331
Link To Document :
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