• DocumentCode
    3547320
  • Title

    A piezoelectric vibration harvester based on clamped-guided beams

  • Author

    Wang, Z. ; Matova, S. ; Elfrink, R. ; Jambunathan, M. ; de Nooijer, C. ; van Schaijk, R. ; Vullers, R.J.M.

  • Author_Institution
    Imec/Holst Centre, Eindhoven, Netherlands
  • fYear
    2012
  • fDate
    Jan. 29 2012-Feb. 2 2012
  • Firstpage
    1201
  • Lastpage
    1204
  • Abstract
    The paper addresses the design, modeling, fabrication and experimental results of a piezoelectric energy harvester based on clamped-guided beams. The design is featured by shorter mass displacement and higher reliability than cantilever beams. Two separate sets of capacitors allow exploiting both tensile and compressive stress at the same time. The maximum output power reaches about 20 μW at an input acceleration of 1.2 g. A tuning range of 3 Hz is demonstrated by varying the voltage across the capacitors. Nonlinear behavior observed at larger mass displacement is also discussed.
  • Keywords
    capacitors; energy harvesting; piezoelectric transducers; vibrations; cantilever beams; capacitors; clamped-guided beams; compressive stress; frequency 3 Hz; mass displacement; nonlinear behavior; piezoelectric vibration harvester; reliability; tensile stress; Acceleration; Capacitors; Frequency measurement; Power generation; Resonant frequency; Tuning; Vibrations;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
  • Conference_Location
    Paris
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-0324-8
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2012.6170379
  • Filename
    6170379