DocumentCode
3547320
Title
A piezoelectric vibration harvester based on clamped-guided beams
Author
Wang, Z. ; Matova, S. ; Elfrink, R. ; Jambunathan, M. ; de Nooijer, C. ; van Schaijk, R. ; Vullers, R.J.M.
Author_Institution
Imec/Holst Centre, Eindhoven, Netherlands
fYear
2012
fDate
Jan. 29 2012-Feb. 2 2012
Firstpage
1201
Lastpage
1204
Abstract
The paper addresses the design, modeling, fabrication and experimental results of a piezoelectric energy harvester based on clamped-guided beams. The design is featured by shorter mass displacement and higher reliability than cantilever beams. Two separate sets of capacitors allow exploiting both tensile and compressive stress at the same time. The maximum output power reaches about 20 μW at an input acceleration of 1.2 g. A tuning range of 3 Hz is demonstrated by varying the voltage across the capacitors. Nonlinear behavior observed at larger mass displacement is also discussed.
Keywords
capacitors; energy harvesting; piezoelectric transducers; vibrations; cantilever beams; capacitors; clamped-guided beams; compressive stress; frequency 3 Hz; mass displacement; nonlinear behavior; piezoelectric vibration harvester; reliability; tensile stress; Acceleration; Capacitors; Frequency measurement; Power generation; Resonant frequency; Tuning; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location
Paris
ISSN
1084-6999
Print_ISBN
978-1-4673-0324-8
Type
conf
DOI
10.1109/MEMSYS.2012.6170379
Filename
6170379
Link To Document