Electromagnetic energy harvester by using buried NdFeB

This study describes the fabrication and measurement of an electromagnetic-type energy harvester by using buried NdFeB/Ta multilayer films. The energy harvester is fabricated by bonding a vibratory mass with buried micro-magnets and a stator with integrated micro-coils together. The performance of the micro-magnets was enhanced by new methods of a mechanical polishing process of buried NdFeB. The output power of the energy harvester was improved to 760 pW with an applied vibration amplitude of 48 μm_p-p at 94.9 Hz.