DocumentCode
3547786
Title
Pondermotive-driven "acceleration" of etch rates for short-pulse laser micromachining of transparent glasses
Author
Herman, Peter R. ; Higaki, Hiroaki ; Rouillon, E. ; Marjoribanks, R.S.
Author_Institution
Dept. of Electr. & Comput. Eng., Toronto Univ., Ont., Canada
fYear
1998
fDate
3-8 May 1998
Firstpage
524
Lastpage
525
Abstract
Summary form only given. The move to picosecond and subpicosecond laser materials processing marks an important transition between conventional micromachining applications using nanosecond lasers and new strong-field interactions driven only by intense femtosecond laser light. Shorter-duration pulses provide more precise etch control and negligible thermal stress for application to a diverse range of materials, including transparent ones such as glass. In this paper, laser ablation of transparent glasses at high field intensity is described in the transitional picosecond domain.
Keywords
chirp modulation; glass; high-speed optical techniques; laser ablation; laser beam etching; laser beam machining; micromachining; optical pulse compression; chirped pulse amplification; etch rates; high field intensity; improved surface morphology; laser ablation; picosecond laser materials processing; pondermotive-driven acceleration; rapid etching; short-pulse laser micromachining; strong-field interactions; subpicosecond laser materials processing; transitional picosecond domain; transparent glasses; Etching; Glass; Laser ablation; Laser applications; Laser transitions; Materials processing; Micromachining; Optical materials; Stress control; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1998. CLEO 98. Technical Digest. Summaries of papers presented at the Conference on
Conference_Location
San Francisco, CA, USA
Print_ISBN
1-55752-339-0
Type
conf
DOI
10.1109/CLEO.1998.676583
Filename
676583
Link To Document