• DocumentCode
    3547786
  • Title

    Pondermotive-driven "acceleration" of etch rates for short-pulse laser micromachining of transparent glasses

  • Author

    Herman, Peter R. ; Higaki, Hiroaki ; Rouillon, E. ; Marjoribanks, R.S.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Toronto Univ., Ont., Canada
  • fYear
    1998
  • fDate
    3-8 May 1998
  • Firstpage
    524
  • Lastpage
    525
  • Abstract
    Summary form only given. The move to picosecond and subpicosecond laser materials processing marks an important transition between conventional micromachining applications using nanosecond lasers and new strong-field interactions driven only by intense femtosecond laser light. Shorter-duration pulses provide more precise etch control and negligible thermal stress for application to a diverse range of materials, including transparent ones such as glass. In this paper, laser ablation of transparent glasses at high field intensity is described in the transitional picosecond domain.
  • Keywords
    chirp modulation; glass; high-speed optical techniques; laser ablation; laser beam etching; laser beam machining; micromachining; optical pulse compression; chirped pulse amplification; etch rates; high field intensity; improved surface morphology; laser ablation; picosecond laser materials processing; pondermotive-driven acceleration; rapid etching; short-pulse laser micromachining; strong-field interactions; subpicosecond laser materials processing; transitional picosecond domain; transparent glasses; Etching; Glass; Laser ablation; Laser applications; Laser transitions; Materials processing; Micromachining; Optical materials; Stress control; Thermal stresses;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 1998. CLEO 98. Technical Digest. Summaries of papers presented at the Conference on
  • Conference_Location
    San Francisco, CA, USA
  • Print_ISBN
    1-55752-339-0
  • Type

    conf

  • DOI
    10.1109/CLEO.1998.676583
  • Filename
    676583