DocumentCode
3550375
Title
Modeling with hierarchical Petri net of semiconductor manufacturing system
Author
Dan, Huang ; Juanwei, Yan ; Fei, Qiao
Author_Institution
CIMS Res. Center, Tongji Univ., Shanghai, China
Volume
3
fYear
2004
fDate
6-9 Dec. 2004
Firstpage
2217
Abstract
A new kind of hierarchical Petri net (HPN) and its modeling approach for semiconductor manufacturing system are presented in this paper. Firstly, the applications of Petri nets in semiconductor manufacturing system are briefly reviewed. Then the definition of HPN and its modeling procedure are given. Finally, an application-oriented case study is illustrated.
Keywords
Petri nets; flow shop scheduling; hierarchical systems; integrated circuit manufacture; semiconductor device manufacture; HPN; hierarchical Petri net; modeling; semiconductor manufacturing system; Job shop scheduling; Manufacturing processes; Manufacturing systems; Optimal scheduling; Petri nets; Postal services; Production; Semiconductor device manufacture; Time measurement; Virtual manufacturing;
fLanguage
English
Publisher
ieee
Conference_Titel
Control, Automation, Robotics and Vision Conference, 2004. ICARCV 2004 8th
Print_ISBN
0-7803-8653-1
Type
conf
DOI
10.1109/ICARCV.2004.1469775
Filename
1469775
Link To Document