Title :
Laser micromachining with ultrafast pulses
Author :
Liu, Xindong ; Du, Ding-Zhu ; Tien, A.-C. ; Mourou, Gerard
Author_Institution :
Centre for Ultrafast Opt. Sci., Michigan Univ., Ann Arbor, MI, USA
Abstract :
Summary form only given. As has been shown, the precision, with which the threshold of laser-induced breakdown (LIB) can be determined, increases dramatically as the pulse width of the laser decreases to picosecond and sub-picosecond regime. Also for ultrashort pulses the energy fluence needed to initiate breakdown is much less then the nanosecond pulse regime. In addition, picosecond and femtosecond laser pulses can deliver extremely localized heat to the target because the thermal diffusion from the focal region, which caused the surrounding area to heat up, is negligible within the pulse duration. This has opened doors to ultrafast laser applications in micromachining.
Keywords :
high-speed optical techniques; laser beam machining; micromachining; laser micromachining; laser-induced breakdown; ultrafast pulses; Electric breakdown; Laser ablation; Laser theory; Micromachining; Microscopy; Optical pulses; Plastics; Positron emission tomography; Space vector pulse width modulation; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics, 1996. CLEO '96., Summaries of papers presented at the Conference on
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
1-55752-443-2