Laser direct write deposition of copper and silver conductor lines from solution

Summary form only given. Liquid encapsulated Laser Chemical Vapor Deposition (LLCVD) of metal and insulator patterns has previously been demonstrated for neat liquids and volatile molecular precursors in solution. In LLCVD, the focused laser beam locally heats the substrate immersed in a liquid containing the precursor. In this paper we present an investigation of direct write laser deposition of Cu and Ag conductor lines from solutions of the corresponding salts in various solvents.