DocumentCode
355177
Title
Delay time in coplanar strip transmission lines on Si/SiO/sub 2//Si multilayer substrates
Author
Chou, Stephen Y.
fYear
1996
fDate
2-7 June 1996
Firstpage
452
Lastpage
453
Abstract
Summary for only given. We have studied the phase velocities of coplanar strip (CPS) transmission lines on Si/SiO/sub 2//Si multilayer substrates. Because the top Si layer of the substrate is very thin, the phase velocity measured in our experiments should be close to that in ICs.
Keywords
delays; elemental semiconductors; semiconductor-insulator-semiconductor devices; silicon; silicon compounds; strip lines; IC; Si-SiO/sub 2/-Si; Si/SiO/sub 2//Si multilayer substrate; coplanar strip transmission line; delay time; phase velocity; Coplanar transmission lines; Coplanar waveguides; Delay effects; Laser beams; Laser excitation; Nonhomogeneous media; Pump lasers; Strips; Switches; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1996. CLEO '96., Summaries of papers presented at the Conference on
Conference_Location
Anaheim, CA, USA
Print_ISBN
1-55752-443-2
Type
conf
Filename
864914
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