Out-of-plane refractive microlens for freespace integrated optics

Author

King, C.R. ; Lin, Lih Y. ; Wu, Ming C.

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

fYear

1996

fDate

2-7 June 1996

Firstpage

459

Lastpage

460

Abstract

Summary form only given. In summary, we believe an out-of-plane spherical microlens standing perpendicular to the substrate has been demonstrated for the first time using surface-micromachining technology. Light emitted from an optical fiber is successfully collimated by the microlens to a divergence angle of 0.15", and the focal length is measured to be 645 /spl mu/m. These microlenses can be combined with other out-of-plane micro-optical components on a silicon substrate to form a free space micro-optical bench.

Keywords

integrated optics; lenses; micromachining; optical collimators; optical fabrication; optical focusing; 645 mum; divergence angle; focal length measurement; free space micro-optical bench; freespace integrated optics; optical fiber; out-of-plane micro-optical components; out-of-plane refractive microlens; out-of-plane spherical microlens; silicon substrate; substrate; surface-micromachining technology; Integrated optics; Lenses; Microoptics; Optical beams; Optical device fabrication; Optical fibers; Optical refraction; Optical sensors; Resists; Scanning electron microscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 1996. CLEO '96., Summaries of papers presented at the Conference on

Conference_Location

Anaheim, CA, USA

Print_ISBN

1-55752-443-2

Type

conf

Filename

864923