Refractory sub-micron electron devices

Several kinds of electron devices of sub-micron dimensions, the sole constituents of which are refractory metals and dielectrics, are under development at SRI, with a view toward high reliability and stability in systems containing large numbers of such components. Current work on micron-size tubes with field emission cathodes and on binary storage elements in this size range, accessible with high-resolution electron beams, is described. Also, the film deposition and micromachining techniques for producing such devices are discussed.