DocumentCode
3552547
Title
The electron beam fabrication of small geometry transistors
Author
Larkin, M.W.
Volume
12
fYear
1966
fDate
1966
Firstpage
108
Lastpage
108
Abstract
The present trend in Molecular Electronics is both to reduce the overall size of the completed circuit and also to go to more complex circuits containing larger numbers of components. Both of these tendencies result in the requirement of smaller component sizes in the circuit. However the planar method normally used to fabricate these components is subject to certain dimensional limitations.
Keywords
Bipolar transistors; Circuits; Electron beams; Electron optics; Etching; Geometry; Molecular electronics; Optical device fabrication; Resists; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1966 International
Type
conf
DOI
10.1109/IEDM.1966.187730
Filename
1474569
Link To Document