• DocumentCode
    3552741
  • Title

    A unique filamentary-transistor structure

  • Author

    Senhouse, L.S., Jr.

  • Author_Institution
    Bell Telephone Laboratories, Murray Hill, N. J.
  • Volume
    13
  • fYear
    1967
  • fDate
    1967
  • Firstpage
    140
  • Lastpage
    140
  • Abstract
    A unique epitaxial filamentary transistor design, using the substrate as the emitter, described. This structure is made by growing a high-resistivity boron-doped epitaxial layer on a low-resistivity arsenic-doped substrate. Contact is made from the surface to the substrate with a phosphorus diffusion. Ring-and-dot base contacts are made directly on the p-type epitaxial layer with the beam-lead contact process. The spreading resistance under the dot is conductivity modulated when the substrate is adequately biased in the forward direction with respect to the most positive potential point on the edge of the space-charge region in the epitaxial layer. With the dot grounded and a negative bias on the ring, this point lies below the dot. Potential distributions during the off state have been calculated on the computer and will be presented.
  • Keywords
    Conductivity; Contact resistance; Epitaxial layers; Fabrication; Laboratories; Silicon; Substrates; Surface resistance; Telephony; Time measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1967 International
  • Type

    conf

  • DOI
    10.1109/IEDM.1967.187902
  • Filename
    1474983