DocumentCode :
3553578
Title :
Ion implanted field effect transistor for power applications
Author :
Lecrosnier, D.
Volume :
18
fYear :
1972
fDate :
1972
Firstpage :
134
Lastpage :
136
Abstract :
The aim of this paper is to report the realization of a silicon field effect transistor for power applications, using a process in which high energy ion implantation technique is coupled with the planar technology. This device, called "Gridistor", a multi-channel field effect transistor having a p-type buried layer as gate, presents certain advantages for power generation and amplification at several gigahertz. Our purpose is to realize devices with the following characteristics: 1 watt at 3 gigahertz in a class A amplifier with 6 db power gain.
Keywords :
Annealing; Boron; Etching; FETs; Gain; Gold; Power amplifiers; Silicon; Temperature; Testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting, 1972 International
Type :
conf
DOI :
10.1109/IEDM.1972.249354
Filename :
1477177
Link To Document :
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