• DocumentCode
    3553701
  • Title

    Electrical characteristics of long CCD shift registers fabricated using Al-Al2O3-Al double level metallization

  • Author

    Collins, D.R. ; Rhines, W.C. ; Barton, J.B. ; Shortes, S.R. ; Brodersen, R.W. ; Tasch, A.F., Jr.

  • Author_Institution
    Texas Instruments Incorporated, Dallas, Texas
  • fYear
    1973
  • fDate
    3-5 Dec. 1973
  • Firstpage
    29
  • Lastpage
    29
  • Keywords
    Aluminum; Charge coupled devices; Charge transfer; Clocks; Electric variables; Electrodes; Fabrication; Instruments; Metallization; Shift registers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1973 International
  • Conference_Location
    Washington, DC, USA
  • Type

    conf

  • DOI
    10.1109/IEDM.1973.188639
  • Filename
    1477516
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3553701