Modal analysis of sub-/spl mu/m period nm-linewidth semiconductor gratings

Summary form only given. We have carried out a rigorous electromagnetic analysis of nm-linewidth, sub-/spl mu/m period, rectangular semiconductor gratings based on the modal theory of square-profiled gratings using exact eigensolutions in the grating region. As opposed to the traditional rigorous coupled wave analysis, the modal analysis allows us to analyze the role of each eigenfunction and provides much greater physical insight with comparable computational difficulty. These studies are important for understanding the electromagnetic response of quantum scale semiconductor structures such as gratings.