• DocumentCode
    3554340
  • Title

    Session 2: Device technology—Device patterning techniques [breaker page]

  • Author

    Rideout, V.L.

  • Author_Institution
    IBM T. J. Watson Research Center, Yorktown Heights, NY, USA
  • fYear
    1977
  • fDate
    5-7 Dec. 1977
  • Firstpage
    7
  • Lastpage
    7
  • Abstract
    Start of Session 2: Device Technology-Device Patterning Techniques. International Ballroom East (Chairman: V.L. Rideout; Organizer: R.F.W. Pease).
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1977 International
  • Conference_Location
    Washington, DC, USA
  • Type

    conf

  • DOI
    10.1109/IEDM.1977.189141
  • Filename
    1479221
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3554340