• DocumentCode
    3554508
  • Title

    Session 23: Device technology—New fabrication and characterization techniques

  • Author

    Fonash, Stephen

  • fYear
    1977
  • fDate
    5-7 Dec. 1977
  • Firstpage
    481
  • Lastpage
    481
  • Abstract
    Start of Session 23: Device technology—New fabrication and characterization techniques.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1977 International
  • Conference_Location
    Washington, DC, USA
  • Type

    conf

  • DOI
    10.1109/IEDM.1977.189295
  • Filename
    1479375
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3554508