• DocumentCode
    3554967
  • Title

    Session 20 Device technology — Contacts and metallization

  • Author

    Voltmer, F.

  • Author_Institution
    Intel Corporation, Livermore, CA, USA
  • fYear
    1979
  • fDate
    3-5 Dec. 1979
  • Firstpage
    453
  • Lastpage
    453
  • Abstract
    Start of the above-titled section of the conference proceedings.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1979 Internationa
  • Conference_Location
    Washington, DC, USA
  • Type

    conf

  • DOI
    10.1109/IEDM.1979.189653
  • Filename
    1480518
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3554967