Title :
Storage characteristics of the Hi-C dynamic RAM cell
Author :
Yaney, D.S. ; Clemens, J.T.
Author_Institution :
Bell Laboratories, Allentown, Pennsylvania
Keywords :
Atomic layer deposition; Capacitors; DRAM chips; Electric breakdown; Implants; Leakage current; Photonic band gap; Silicon; Temperature distribution; Testing;
Conference_Titel :
Electron Devices Meeting, 1979 Internationa
DOI :
10.1109/IEDM.1979.189733
