Title :
A joint industry-university CIM project for university microelectronics manufacturing
Author :
Fuller, Lynn F. ; Karacal, Cem ; VanDenbosch, Tom J. ; Slagsvol, Steve ; Poponiak, Mike
Author_Institution :
Dept. of Microelectron. Eng., Rochester Inst. of Technol., NY, USA
Abstract :
A student-operated factory for manufacturing integrated circuits has been in operation at the Rochester Institute of Technology (RIT) since 1987. In 1989 RIT and IBM joined together to improve the factory operation by installing a computer-integrated manufacturing (CIM) system. The CIM system allows users control equipment access, monitor equipment status, do lot tracking, provide detailed current operator instructions, provide a paperless manufacturing environment, do scheduling, do manual input and auto input data collection, do statistical process control, do materials planning, download recipes to equipment, and realize feedback and feedforward control. Reports are routinely generated. The project is mostly completed and has proven to be successful in reducing cycle time, improving manufacturing flexibility, and increasing the quality of the devices manufactured at RIT
Keywords :
CAD/CAM; education; factory automation; integrated circuit manufacture; manufacturing computer control; scheduling; statistical process control; RIT; Rochester Institute of Technology; auto input; current operator instructions; cycle time; equipment access; equipment status; feedback control; feedforward control; joint industry-university CIM project; lot tracking; manual input; materials planning; paperless manufacturing environment; scheduling; statistical process control; student-operated factory; university microelectronics manufacturing; Computer integrated manufacturing; Computerized monitoring; Control equipment; Electrical equipment industry; Integrated circuit manufacture; Integrated circuit technology; Manufacturing industries; Manufacturing processes; Production facilities; Pulp manufacturing;
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 1991. Proceedings., Ninth Biennial
Conference_Location :
Melbourne, FL
Print_ISBN :
0-7803-0109-9
DOI :
10.1109/UGIM.1991.148117