DocumentCode
3555136
Title
Session 6 Device technology — Contacts and interconnects
Author
Pickar, K.A.
Author_Institution
Signetics, Inc., Sunnyvale, CA, USA
fYear
1980
fDate
8-10 Dec. 1980
Firstpage
131
Lastpage
131
Abstract
Start of the above-titled section of the conference proceedings.
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1980 International
Conference_Location
Washington, DC, USA
Type
conf
DOI
10.1109/IEDM.1980.189771
Filename
1481214
Link To Document