Title :
Session 16 Device technology — Insulator technology
Author :
Yeh, K.W. ; Nishi, Yoshio
Author_Institution :
Xerox Corporation, El Segundo, California
Abstract :
Start of the above-titled section of the conference proceedings.
Conference_Titel :
Electron Devices Meeting, 1981 International
Conference_Location :
Washington, DC, USA
DOI :
10.1109/IEDM.1981.190090