Title :
Session 25 Device technology — Process technology
Author :
Antoniadis, Dimitri A. ; Barbe, D.F.
Author_Institution :
Massachusetts Institute of Technology, Cambridge, MA, USA
Abstract :
Start of the above-titled section of the conference proceedings.
Conference_Titel :
Electron Devices Meeting, 1981 International
Conference_Location :
Washington, DC, USA
DOI :
10.1109/IEDM.1981.190145
