Title :
A vertically isolated self-aligned transistor
Author :
Takemoto, T. ; Fujita, T. ; Kawakita, K. ; Sakai, H. ; Komeda, T.
Author_Institution :
Matsushita Electric Industry Co., Ltd., Osaka, Japan
Keywords :
Coatings; Etching; Laboratories; Large scale integration; Oxidation; Power dissipation; Semiconductor films; Semiconductor impurities; Silicon; Substrates;
Conference_Titel :
Electron Devices Meeting, 1981 International
DOI :
10.1109/IEDM.1981.190190
