Characteristics of N-I-P hydrogenated amorphous silicon solar cells have been studied systematically by varying the thickness of each layer. Open circuit voltage and fill factor increased from 807 mV to 896 mV and from 0.37 to 0.61, respectively, by increasing thickness of the N-layer from 40 A to 160 A. Short circuit current density increase from 9.2 mA/cm
2to 11 mA/cm
2by increasing N-layer thickness from 40 Å to 70 Å but decreased thereafter due to the dead layer effect. Increasing the undoped layer (I) thickness from 0.25

m to 1.0

m caused short circuit current to increase from 8.1 mA/cm
2to 10.2 mA/cm
2while fill factor decreased from 0.6 to 0.34. Dark I-V analysis, the variation of short circuit current vs open circuit voltage and spectral response data are presented. Optimum device structure, for an efficiency exceeding 7%, is 700 A ITO/120 ± 20 A N/0.5

m I/ 300-600 Å P/stainless steel substrate.