DocumentCode

3556155

Title

A self-aligned 1- µm CMOS technology for VLSI

Author

Hu, G.J. ; Taur, Y. ; Dennard, R.H. ; Terman, L.M. ; Ting, C.Y.

Author_Institution

Xerox Corporation, Palo Alto, California

fYear

1983

fDate

5-7 Dec. 1983

Firstpage

739

Lastpage

741

Keywords

CMOS technology; Very large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1983 International

Conference_Location

Washington, DC, USA

Type

conf

DOI

10.1109/IEDM.1983.190615

Filename

1483740